The design features of the multi vane type of vacuum film coating machine
1) fixed cylinder 3 cylinder shape, large diameter, thick wall structure design and to the symmetry of the fixed way, to ensure that it has enough strength and rigidity. At the same time, but also prevent high-temperature sputtering abrasive to its internal parts pollution, ensuring the poking disc rotation flexibility.
2) circular bearing seat 2 design, ensure the bearing seat installed seal and verticality; shaft diameter size increases, increase the bearing seat 2 two bearing installation space, improve its strength and rigidity to ensure the consistency of the rotation axis in the process of stiffness and the toggle plate 15 rotation flexibility, position and repeat.
3) loading transposition mechanism, by enlargement of the bearing plate 16 diameter, so that the body in the plane direction of the effective area increase, installation of large diameter (phi 26.5mm) comparison, is conducive to the optical path adjustment, to improve the quality of optical thin film; comparison 12 by the monolithic glass as a comparison unit, compare the spatial superposition installation, glass superposition installation to realize a can be placed 50-100 tablets tablets was compared in a comparison of the storage cylinder 13, solve coater coating of multilayer precision optical thin films and compare the number of less influence coating layers and the precision problem.
4) positioning plate and Slot Type Photocoupler 17 with and through the slot Type Photocoupler to location aware disk three score of 120 DEG slit, to control the rotation of the motor to stop. The consistency of 1 axis rotary positioning repeat is guaranteed, the dialing plate 15 to achieve accurate pick action.
5) rotary seal feeding mechanism introduced Wilson sealing mechanism 5, both to ensure motor through gear drive shaft 1 flexible rotation, and ensure that the vacuum chamber of the sealing action of the external. Optimized design of vacuum film coating machine,
1) the structure is simple, the strength is high, the reliability is good;
2) compared with the large number of film loading, production efficiency, can be coated with ultra precision optical film;
3) compared with the diameter of the film, improve the accuracy of the thin film monitoring, reduce the requirements of the hardware system, the system is easy to realize automatic control;
4) maintenance cost is low.